The invention discloses an equipment for producing trichlorosilane by comprehensively utilizing waste silicon powder. The equipment comprises a trichlorosilane synthetic furnace mixed gas outlet pipe connected with a high-efficiency cyclone separator; wherein a material discharge port of the high-efficiency cyclone separator is connected with a …
The Siemens process (Fig. 10.5) uses as a precursor to Si SG, trichlorosilane (SiHCl 3).SiHCl 3 originates from a process that begins with quartz reduction in an electric arc furnace in order to obtain metallurgical grade silicon (Si MG).The Si MG produced reacts with hydrogen chloride (HCl) in a hydrochlorination synthesis reactor to produce a gas …
State-of-the-art converters are purpose built and have competitive energy usage per kilogram of TCS produced compared to the fluid bed process. Ultra-high purity TCS is …
Polycrystalline silicon (polysilicon) is typically produced by reacting trichlorosilane and hydrogen in a bell jar style chemical vapor deposition (CVD) reactor. The CVD reactors run in a batch mode and contain silicon filaments that are resistively heated to over 1000°C. ... We also provide operational support and continued optimization of ...
Abstract. The objective of this paper is to design and optimize a trichlorosilane distillation system with the aim of obtaining this product with a purity higher than 0.99999 mole fraction, so that it can employed as a source of solar-grade silicon. A conventional process with at least two columns is capable of separating the …
Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process. ... the equipment calculation formula references to a study by Douglas, 39 and the utility price references to a study by Turton et al ... trichlorosilane and silicon-tetrachloride. J. Chem. Thermodyn. 2015, 91, 420–426. …
Advantages, drawbacks and production cost reduction methods have been considered with respect to four common trichlorosilane synthesis processes: hydrogen …
process and converts a batch process into a more economical continuous process. The spherical granular silicon product fromfluidized-bed reactors is preferred to the polysilicon rods produced by the Siemens process for down-stream processing. Production of silicon byfluidized beds has been carried on
To remove the 0.5% to 1.5% of impurities contained in metallurgical-grade (MG) silicon, the Siemens process creates trichlorosilane (SiHCl 3, or briefly TCS), a …
The primary process used to obtain polysilicon is the Siemens process [5,6,7,8,9], which is used by more than 80% of polysilicon manufacturers worldwide. It mainly involves the hydrochlorination of industrial silicon to trichlorosilane (SiHCl 3) and SiHCl 3 distillation, followed by the hydrogen reduction of the SiHCl 3 to polysilicon.
Trichlorosilane is used in the silicon refining industry in the production of high purity silicon via the conventional Siemens process [3,4]. Figure 8.1 shows asketch of this process. Silicon is deposited on silicon rods heated to about 1150 C by high voltage current controlled by complex switchgear and transformers. This batch
Introduction. Polycrystalline silicon is the basic raw material in electronic and solar photovoltaic power generation industries. With the rapid development of the electronic industry, especially under the great foreground of photovoltaic (PV) industry, polysilicon manufacturing industry has increases with every year 15–30% (Tejero …
Two preparation processes of trichlorosilane for producing polysilicon are described including process flow,process characteristics and structure of core equipment.The raw materials of improved Siemens process are silica powder and hydrogen chloride,which has wide material sources and low cost.The raw materials of hydrochlorination process …
Almost all commercial Siemens reactors use trichlorosilane as the feed material. The process produces very little silicon powder, as the reaction intermediate …
Metal-grade silicon as the raw material reacts with hydrogen chloride to produce trichlorosilane (TCS); after distillation and purification, trichlorosilane deposits …
FLUID FLOW AND TRANSPORT PHENOMENA Chinese Journal of Chemical Engineering, 19(1) 1ü9 (2011) Effect of Boundary Layers on Polycrystalline Silicon Chemical Vapor Deposition in a Trichlorosilane and Hydrogen System * ZHANG Pan (ᕖᬶ) 1, WANG Weiwen (⧠Օᮽ) 2, CHENG Guanghui (䱾ݿ䖿) 2 and LI …
A method for recovering waste silicon powder from the trichlorosilane synthetic furnace comprises the synthetic furnace and a silicon powder collection tank, and includes steps: A, replacing the synthetic furnace after the synthetic furnace stops normally; B, after replacement is qualified, connecting a silicon powder discharging valve at the bottom of …
This chapter describes the process of preparation of high-purity polysilicon. Metal-grade silicon as the raw material reacts with hydrogen chloride to produce trichlorosilane (TCS); after distillation and purification, trichlorosilane deposits on the filament of high-purity silicon to obtain polysilicon at the temperature of 1050 °C in a high …
The main uses of silicon metal powder: silicon metal powder is widely used in refractories, powder metallurgy industry, in order to improve the high temperature, abrasion and oxidation resistance. Its products are widely used in steel-making furnaces, kilns, kiln furniture. In organic silicon chemical industry, metal powder is the basic raw ...
3. TCS synthesis process and main equipment The fluidized bed reactor is generally used for TCS synthesis reactor. See Fig. 2 for its process flow. The chlorinator is a fluidized bed reactor. Metallurgical grade Si powder is fed to the middle of the reactor. HCl gas and some recycled gas from the hydrogen
Novel technical solutions and ideas for increasing the yield of solar and semiconductor grade polycrystalline silicon processes have been analyzed. The … See more
Novel technical solutions and ideas for increasing the yield of solar and semiconductor grade polycrystalline silicon processes have been analyzed. The predominant polycrystalline silicon technology is currently still the Siemens process including the conversion of technical grade silicon (synthesized by carbon-thermal reduction of …
In Summer 2005, Joint Solar Silicon started up a pilot plant for the production of silicon at Degussa's site in Rheinfelden, Germany. The main advantage of this process is that the energy consumption of the decomposition of silane to silicon powder in comparison to all other deposition processes is very low. Download : …
The invention discloses equipment for producing trichlorosilane by comprehensively utilizing waste silicon powder. The equipment comprises a trichlorosilane synthetic furnace mixed gas outlet pipe, wherein the trichlorosilane synthetic furnace mixed gas outlet pipe is connected with a high-efficiency cyclone separator; a material discharge …
@article{osti_5901517, title = {LSA silicon material task closed-cycle process development. Interim summary report, August-December 1978}, author = {Roques, R. A. and Wakefield, G. F. and Blocher, Jr., J. M. and Browning, M. F. and Wilson, W.}, abstractNote = {This program was Phase I of an effort to achieve production of low-cost …
tented a process in which hydrochlorination is carried out at 400–525 °C and ~35 MPa in the presence of copper, nickel or their compounds [11]. Depending on process temperature, pressure, H 2: SiCl 4 molar ratio, contact du-ration and silicon powder coarseness, the authors could achieve a trichlorosilane yield of 14 to 38 mol.%.
3. TCS synthesis process and main equipment The fluidized bed reactor is generally used for TCS synthesis reactor. See Fig. 2 for its process flow. The chlorinator is a …
1. Introduction. Polycrystalline silicon is the basic raw material in electronic and solar photovoltaic power generation industries. With the rapid development of the electronic industry, especially under the great foreground of photovoltaic (PV) industry, polysilicon manufacturing industry has increases with every year 15–30% (Tejero …
Trichlorosilane Silicon chloroform HSiC1 3 1 1295 Silicon tetrachloride Silicon chloride, Tetrachlorosilane SiC1 4 1 1818 Many more than the above sixteen chlorosilanes are known and some are used in commerce. Their properties vary; and, even though all chlorosilanes are classifiable as
In the direct chlorination process, TCS is produced from MG Si and anhydrous hydrogen chloride (HCl) according to the exothermic reaction: MG Si + 3HCl→ SiHCl 3 + H 2, at about 350 °C and about 5 bar (g). MG silicon at > 98% purity is fluidized with HCl in a specially designed FBR. The yield of TCS is over 85%.
The suggested method was leaching silicon powder in hydrofluoric acid and before World War 2 this was the only method available. ... Reactors which utilize trichlorosilane as their reactant gas operates their ... The process of producing silane for this process is therefore often more complicated and makes use of more advanced …